Solid-state imaging device and method of manufacturing the same
US5336367A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | May 24, 1993 |
| Grant date | Aug 9, 1994 |
| Priority date | — |
| Expiry date | May 24, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/8063
Abstract
A solid-state imaging device comprises a color filter formed of a colored transparent material having intended spectral transmissivity characteristics. The color filter possesses plural spectral transmissivity characteristics in one layer. In this constitution, the distance from the color filter to the light sensing part is not extended, and flicker and other image characteristic defects are eliminated- Being not of laminate structure, cracks of color filter due to thermal impact are eliminated, and the reliability is enhanced. In the manufacturing method, by dry-etching of the colored transparent material, the solid-state imaging-device having a color filter is realized. Accordingly, the color filter my be formed without exposure accompanied by pattern formation, development and dyeing process, so that an efficient manufacturing method is realized.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.