Patent · US Expired

Buried avalanche diode having laterally adjacent semiconductor layers

US5336920A · kind A · utility

7Cited by
1References
20Claims
0Family size

Assignee

Inventor

Key dates

Filing dateMar 17, 1993
Grant dateAug 9, 1994
Priority date
Expiry dateMar 17, 2013

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D8/25

Abstract

An avalanche diode structure incorporated in an integrated circuit is embodied by the lateral junction between two adjacent buried layers having opposite conductivity types and a high doping level. This diode includes: a first highly doped buried layer of the same first conductivity type as the integrated circuit substrate; a second highly doped buried layer of the second conductivity type, surrounding the first buried layer and laterally contacting the first layer; and a third low doped buried layer of the second conductivity type disposed beneath the first buried layer and overlapping with respect to the second layer so as to also contact a portion of the second buried layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.