Copolymers of 4-hydroxystyrene and alkyl substituted-4-hydroxystyrene in admixture with a photosensitizer to form a photosensitive composition

US5342727A · kind A · utility

Assignees

• Hoechst Celanese Corporation · US
• IBM Corporation · US

Inventors

• Richard Vicari · Pearland, US
• Douglas J. Gordon · Somerville, US
• William D. Hinsberg · Fremont, US
• Dennis McKean · San Jose, US
• Carlton G. Willson · Austin, US
• Ralph R. Dammel · Flemington, US

Key dates

• Filing date: Dec 20, 1991
• Grant date: Aug 30, 1994
• Expiry date: Dec 20, 2011

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/0045
• WIPO field: Macromolecular chemistry, polymers
• WIPO sector: Chemistry

Abstract

A copolymer of (a) an unsubstituted 4-hydroxystyrene monomer and (b) a substituted 4-hydroxystyrene monomer of the formula ##STR1## wherein A, B, C, and D are independently H or C.sub.1 to C.sub.4 alkyl and wherein at least one of B and D is C.sub.1 to C.sub.4 alkyl; and wherein said copolymer has a molecular weight of from about 800 to about 100,000; and wherein the mol ratio of monomer (a) to monomer (b) ranges from about 3:1 to about 1:3.