Illumination device for projection exposure apparatus
US5345292A · kind A · utility
102Cited by
22References
60Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 31, 1993 |
| Grant date | Sep 6, 1994 |
| Priority date | — |
| Expiry date | Mar 31, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70241
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An illumination device, includes a secondary light source forming system having a deflecting member with a conical light deflecting surface for transforming received light into substantially ring-like light, the secondary light source forming system forming a ring-like secondary light source by using the ring-like light; and an optical system for projecting divergent lights from portions of the secondary light source obliquely onto a surface to be illuminated so that the projected lights are superposed one upon another on the surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.