Masato Muraki
95Patents
30h-index
59Co-inventors
91Inventor score
Filing activity: Feb 2, 1988 → Mar 20, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5153773A | Illumination device including amplitude-division and beam movements | Physics | 159 | Expired |
| US4974919A | Illuminating device | Physics | 155 | Expired |
| US5463497A | Illumination device including an optical integrator defining a plurality of secondary light sources and related method | Physics | 134 | Expired |
| US5345292A | Illumination device for projection exposure apparatus | Physics | 102 | Expired |
| US6229647A | Reflection and refraction optical system and projection exposure apparatus using the same | Emerging Cross-Sectional Technologies | 96 | Expired |
| US5834783A | Electron beam exposure apparatus and method, and device manufacturing method | Electricity | 82 | Expired |
| US5189494A | Position detecting method and apparatus | Physics | 81 | Expired |
| US6137113A | Electron beam exposure method and apparatus | Electricity | 70 | Expired |
| US5864142A | Electron beam exposure apparatus and method of controlling same | Electricity | 69 | Expired |
| US5905267A | Electron beam exposure apparatus and method of controlling same | Electricity | 68 | Expired |
| US5182455A | Method of detecting relative positional deviation between two objects | Physics | 67 | Expired |
| US6107636A | Electron beam exposure apparatus and its control method | Electricity | 64 | Expired |
| US6323499A | Electron beam exposure apparatus and method, and device manufacturing method | Electricity | 63 | Expired |
| US5981954A | Electron beam exposure apparatus | Electricity | 48 | Expired |
| US7692166B2 | Charged particle beam exposure apparatus | Electricity | 48 | Active |
| US6124599A | Electron beam exposure system and method of manufacturing devices using the same | Electricity | 47 | Expired |
| US5929454A | Position detection apparatus, electron beam exposure apparatus, and methods associated with them | Electricity | 44 | Expired |
| US6965153B1 | Electrooptic system array, charged-particle beam exposure apparatus using the same, and device manufacturing method | Electricity | 43 | Expired |
| US5973332A | Electron beam exposure method, and device manufacturing method using same | Electricity | 43 | Expired |
| US4947047A | Exposure system with exposure controlling acoustooptic element | Physics | 40 | Expired |
| US6835937B1 | Correcting method for correcting exposure data used for a charged particle beam exposure system | Electricity | 39 | Expired |
| US6166387A | Electron beam exposure apparatus and method | Electricity | 39 | Expired |
| US5117254A | Projection exposure apparatus | Physics | 39 | Expired |
| US5715084A | Reflection and refraction optical system and projection exposure apparatus using the same | Emerging Cross-Sectional Technologies | 37 | Expired |
| US6225637A | Electron beam exposure apparatus | Electricity | 35 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.