Device for holding disk-shaped substrates in the vacuum chamber of a coating or etching apparatus
US5350455A · kind A · utility
16Cited by
4References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 1, 1993 |
| Grant date | Sep 27, 1994 |
| Priority date | — |
| Expiry date | Dec 1, 2013 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/50
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A flat rectangular substrate bed (3) having opposed parallel endwalls (14) and parallel sidewalls (16) receives a pair of clamping jaws (4) each having an L-shaped cross-section with a short limb against each sidewall and a long limb extending halfway over the top surface of the substrate bed. The long limbs (6) have arcuate recesses (7) which cooperate to surround the substrates (2) and thereby center and hold them. The two clamping jaws (4) are held by end bars (11) which are tightly joined to the substrate bed (3) by means of pins (10) and (12) received in respective bores (9) in the jaws and (13) in the endwalls.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.