Process for producing nanometer-size structures on surfaces using electron beam induced chemistry through electron stimulated desorption
US5352330A · kind A · utility
17Cited by
12References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 30, 1992 |
| Grant date | Oct 4, 1994 |
| Priority date | — |
| Expiry date | Sep 30, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/902
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The process of using electron beam induced stimulated desorption chemistry to produce structures of nanometer order size on surfaces. By passivating a reconstructed surface and selectively removing such passivation with an electron beam through the electron stimulated desorption effect, the adsorption of other atoms and/or molecules is controlled at predetermined regions and/or lines on the surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.