Compounds with acid-labile protective groups useful in positive-working radiation-sensitive mixtures

US5356752A · kind A · utility

Assignee

• Hoechst GmbH · DE

Inventors

• Ivan Cabrera · Dreieich, DE
• Walter Spiess · Dieburg, DE

Key dates

• Filing date: Jul 28, 1992
• Grant date: Oct 18, 1994
• Expiry date: Jul 28, 2012

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P20/55
• WIPO field: Organic fine chemistry
• WIPO sector: Chemistry

Abstract

Disclosed are compounds of the formula I ##STR1## in which X is a phenyl, [1]naphthyl or [2]naphthyl radical each substituted by at least one tert.-butoxycarbonyloxy group and, if appropriate, having one or more than one additional substituent, PA0 R.sup.1 is a hydrogen atom, a (C.sub.1 -C.sub.6)-alkyl radical, a (C.sub.6 -C.sub.10)-aryl radical or one of the radicals X and PA0 R.sup.2 and R.sup.3 are identical or different and are a (C.sub.1 -C.sub.12)-alkyl radical in which, if appropriate, up to three methylene groups are replaced by bridge members having at least one hetero atom, such as --O--, --S--, --NR.sup.4 --, --CO--, --CO--O--, --CO--NH--, --O--CO--NH--, --NH--CO--NH--, --CO--NH--CO--, --SO.sub.2 --, --SO.sub.2 --O-- or --SO.sub.2 --NH--, a (C.sub.3 -C.sub.12)-alkenyl, (C.sub.3 -C.sub.12)-alkynyl, (C.sub.4 -C.sub.12)-cycloalkyl, (C.sub.4 -C.sub.12)-cycloalkenyl or (C.sub.8 -C.sub.16)-aralkyl radical in which, if appropriate, up to three methylene groups of the aliphatic moiety are replaced by bridge members of the abovementioned type and which can be substituted in the aromatic moiety by fluorine, chlorine or bromine atoms or by (C.sub.1 -C.sub.4)-alkyl, (C.sub.1 -C.sub.…