Radiation sensitive compositions comprising polymer having acid labile groups
US5362600A · kind A · utility
24Cited by
12References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 25, 1993 |
| Grant date | Nov 8, 1994 |
| Priority date | — |
| Expiry date | May 25, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/11
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The invention provides a radiation sensitive composition having a polymer binder of phenolic and cyclic alcohol units. At least a portion of the phenolic units and/or cyclic alcohol units of the polymer are bonded to acid labile groups. High solubility differentials between exposed and unexposed regions are realized with only moderate substitution of the binder with the acid labile groups.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.