Patent · US Expired

Method of making a semiconductor device with buried electrode

US5364802A · kind A · utility

7Cited by
4References
3Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 1, 1993
Grant dateNov 15, 1994
Priority date
Expiry dateOct 1, 2013

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/231
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device including a bipolar transistor, has a collector region including a first semiconductor region of the first conductivity type and a second semiconductor region of the first conductivity type having higher resistance than the first semiconductor region, a base region including a semiconductor region of the second conductivity type, and an emitter region including a semiconductor region of the first conductivity type. The semiconductor device further comprises a metal layer region for connecting the first semiconductor region and the collector electrode on the collector region provided within the second semiconductor region layer of the collector region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.