Alignment and exposure apparatus and method for manufacture of integrated circuits
US5365342A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 10, 1993 |
| Grant date | Nov 15, 1994 |
| Priority date | — |
| Expiry date | Mar 10, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/30
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An alignment apparatus includes a first off-axis alignment optical system having a magnification, and a second off-axis alignment optical system having a magnification higher than that of the first off-axis alignment optical system, wherein the apparatus is operable in a global alignment mode using the second off-axis alignment optical system. In another aspect, an alignment apparatus which includes a first off-axis alignment optical system having a magnification, a second off-axis alignment optical system having a magnification higher than that of the first off-axis alignment optical system, and a TTL alignment optical system, wherein the alignment apparatus is operable in a global alignment mode using the second off-axis alignment optical system and is operable in another global alignment mode using the TTL optical alignment system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.