Patent · US Expired

Vacuum coating apparatus

US5372693A · kind A · utility

7Cited by

5References

4Claims

0Family size

Assignee

Leybold GmBH · DE

Inventors

Gunter Brauer · Lehre, DE
Ulrich Patz · Gelnhausen, DE
Michael Scherer · Crimmitschau, DE
Joachim Szczyrbowski · Goldbach, DE

Key dates

Filing date	Mar 16, 1994
Grant date	Dec 13, 1994
Priority date	—
Expiry date	Mar 16, 2014

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C14/22
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A vacuum coating apparatus has a pot-like tank (2) against whose open side a portion of a substrate (1) can be held sealingly. In the tank (2) there is disposed a target (7). A shut-off plate (9) makes it possible after lowering the substrate (1) to hold this target (7) under vacuum in a source chamber (11) protected against intrusion of air.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.