DC reactively sputtered optical coatings including niobium oxide
US5372874A · kind A · utility
56Cited by
10References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 19, 1993 |
| Grant date | Dec 13, 1994 |
| Priority date | — |
| Expiry date | Oct 19, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24975
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A multilayer optical coating including at least one layer of niobium oxide deposited by DC reactive sputtering.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.