Inventor · Portland, OR, US

Eric R. Dickey

30Patents
14h-index
33Co-inventors
81Inventor score

Filing activity: Dec 20, 1989 → May 4, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US8187679B2 Radical-enhanced atomic layer deposition system and method Chemistry; Metallurgy 496 Active
US5618388A Geometries and configurations for magnetron sputtering apparatus Chemistry; Metallurgy 75 Expired
US5504389A Black electrode TFEL display Emerging Cross-Sectional Technologies 63 Expired
US5712528A Dual substrate full color TFEL panel with insulator bridge structure Electricity 60 Expired
US5372874A DC reactively sputtered optical coatings including niobium oxide Emerging Cross-Sectional Technologies 56 Expired
US5105310A DC reactively sputtered antireflection coatings Physics 55 Expired
US7923068B2 Fabrication of composite materials using atomic layer deposition Emerging Cross-Sectional Technologies 55 Active
US5270858A D.C. reactively sputtered antireflection coatings Physics 50 Expired
US5450238A Four-layer antireflection coating for deposition in in-like DC sputtering apparatus Chemistry; Metallurgy 37 Expired
US5879519A Geometries and configurations for magnetron sputtering apparatus Chemistry; Metallurgy 35 Expired
US5470452A Shielding for arc suppression in rotating magnetron sputtering systems Electricity 25 Expired
US5725746A Shielding for arc suppression in rotating magnetron sputtering systems Electricity 25 Expired
US5106474A Anode structures for magnetron sputtering apparatus Electricity 24 Expired
US5656888A Oxygen-doped thiogallate phosphor Chemistry; Metallurgy 18 Expired
US5581150A TFEL device with injection layer Emerging Cross-Sectional Technologies 14 Expired
US6358632B1 TFEL devices having insulating layers Emerging Cross-Sectional Technologies 13 Expired
US5022726A Magnesium film reflectors Emerging Cross-Sectional Technologies 10 Expired
US8137464B2 Atomic layer deposition system for coating flexible substrates Chemistry; Metallurgy 8 Active
US8202366B2 Atomic layer deposition system utilizing multiple precursor zones for coating flexible substrates Chemistry; Metallurgy 4 Active
US8637117B2 Inhibiting excess precursor transport between separate precursor zones in an atomic layer deposition system Chemistry; Metallurgy 2 Active
US9263359B2 Mixed metal-silicon-oxide barriers Electricity 2 Active
US9469901B2 Atomic layer deposition method utilizing multiple precursor zones for coating flexible substrates Chemistry; Metallurgy 2 Active
US9647208B2 Low voltage embedded memory having conductive oxide and electrode stacks Physics 1 Active
US9238868B2 Atomic layer deposition method for coating flexible substrates Chemistry; Metallurgy 1 Active
US9435028B2 Plasma generation for thin film deposition on flexible substrates Electricity 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.