Apparatus for holding disk-shaped substrates in the vacuum chamber of a coating or etching apparatus
US5376180A · kind A · utility
21Cited by
4References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 25, 1994 |
| Grant date | Dec 27, 1994 |
| Priority date | — |
| Expiry date | Feb 25, 2014 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/50
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A rectangular substrate bed has on its top surface a row of disk-shaped holding members on which disk-shaped substrates are laterally positioned by a frame member having circular openings which expose the substrates. Seals are provided on each holding member so that substrates can be held in place by vacuum. The frame member is fixed to the substrate bed by clamps having pins which are received in bores at opposite ends of the substrate bed and the frame member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.