Wafer bonding of light emitting diode layers
US5376580A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 19, 1993 |
| Grant date | Dec 27, 1994 |
| Priority date | — |
| Expiry date | Mar 19, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10H20/8162
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of forming a light emitting diode (LED) includes providing a temporary growth substrate that is selected for compatibility with fabricating LED layers having desired mechanical characteristics. For example, lattice matching is an important consideration. LED layers are then grown on the temporary growth substrate. High crystal quality is thereby achieved, whereafter the temporary growth substrate can be removed. A second substrate is bonded to the LED layers utilizing a wafer bonding technique. The second substrate is selected for optical properties, rather than mechanical properties. Preferably, the second substrate is optically transparent and electrically conductive and the wafer bonding technique is carried out to achieve a low resistance interface between the second substrate and the LED layers. Wafer bonding can also be carried out to provide passivation or light-reflection or to define current flow.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.