Reverse direction pyrolysis processing
US5380553A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Dec 24, 1990 |
| Grant date | Jan 10, 1995 |
| Priority date | — |
| Expiry date | Dec 24, 2010 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C18/1291
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention relates to a method of forming a homogeneous ceramic coating on a substrate. The method comprises depositing a preceramic coating on a substrate and then heating the substrate while directing a stream of cooling gas at the surface of the preceramic coating such that a temperature gradient is developed in the coating. This temperature gradient is created in such a way that the preceramic material near the substrate is converted to its ceramic form while the preceramic material near the surface of the coating is deterred from conversion. The temperature gradient is then decreased over time such that all of the preceramic material ceramifies from the substrate outward to form a homogeneous coating on the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.