Patent · US Expired

Multi-chip cooling module and method

US5380956A · kind A · utility

87Cited by
9References
23Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 6, 1993
Grant dateJan 10, 1995
Priority date
Expiry dateJul 6, 2013

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/0002
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A liquid cooling module for semiconductor chips is disclosed. The module includes a plurality of substrates, each containing at least one chip. The substrates are arranged in the module so that when coolant flows through the module, the coolant is exposed to the top and bottom surfaces of the chips. A gasket is used between each substrate. The gasket is made if a Z-axis elastromeric material that is impervious to liquid and therefore directs the flow of the coolant in the module and makes the module liquid tight. The material also is conductive in the Z direction, but not the X or Y direction, thereby making electrical communication between the chips on different substrate levels possible. The module is intended to be attached to a circuit board, thus simplifying the layout of liquid cooled chips on the board.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.