Ultrafine silicon tips for AFM/STM profilometry

US5382795A · kind A · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Thomas Bayer · Igersheim, DE
• Johann Greschner · Neckartenzlingen, DE
• Yves Martin · Ossining, US
• Helga Weiss · Eppelheim, DE
• Hemantha K. Wickramasinghe · Chappaqua, US
• Olaf Wolter · Aidlingen, DE

Key dates

• Filing date: Mar 10, 1994
• Grant date: Jan 17, 1995
• Expiry date: Mar 10, 2014

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S977/878
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An ultrafine tip for AFM and STM profilometry of trenches having sidewalls. The tip includes a lateral circumferential edge protrusion to allow profilometry of the sidewalls of a trench located in a semiconductor or insulator substrate.