Process and apparatus for generating and igniting a low-voltage
US5384018A · kind A · utility
18Cited by
6References
38Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 11, 1993 |
| Grant date | Jan 24, 1995 |
| Priority date | — |
| Expiry date | May 11, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3402
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A cathode chamber (1) with a thermionic cathode (3) generates a low-voltage arc discharge in a vacuum treatment chamber (11). Arcing on wall portions of the treatment chamber (11) is prevented by providing a screen (20), operated so as to be electrically floating, in the region of a diaphragm (9), through which diaphragm (9) the discharge is drawn from the cathode chamber (1) into the treatment chamber (11). The discharge is ignited by impressing portions of the cathode chamber wall with the ignition potential, with respect to the potential of the cathode (3).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.