Resist composition comprising a siloxane or silsesquioxane polymer having silanol groups in a composition with a naphthoquinone compound
US5389492A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Apr 8, 1994 |
| Grant date | Feb 14, 1995 |
| Priority date | — |
| Expiry date | Apr 8, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01B3/004
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A resist composition comprising a compound having an active hydrogen and an alkali-soluble siloxane polymer containing in the molecules thereof at least one unit selected from a unit represented by formula (I) and a unit represented by formula (II) ##STR1## wherein the X's are the same or different and each represents one member selected from the group consisting of hydrogen, ##STR2## (where R represents hydrogen, a hydrocarbon group, or a substituted hydrocarbon group); and a carboxyl group; PA1 R.sub.1, R.sub.2, R.sub.3, R.sub.4, R.sub.5, and R.sub.6 are the same or different and each represents one member selected from the group consisting of hydrogen, a hydroxyl group, a substituted or unsubstituted aliphatic hydrocarbon group, and a substituted or unsubstituted aromatic hydrocarbon group, provided that at least one of R.sub.1 to R.sub.6 is a hydroxyl group; and PA1 l, m, n, and p each is 0 or a positive integer, provided that l and m are not 0 at the same time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.