Wafer basket for containing semiconductor wafers
US5390811A · kind A · utility
71Cited by
8References
9Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Mar 4, 1994 |
| Grant date | Feb 21, 1995 |
| Priority date | — |
| Expiry date | Mar 4, 2014 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65D2543/00972
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A wafer basket which is provided with a new type of locking and unlocking device for locking the top lid to the main body of the outer box and unlocking the same, wherein it is possible to unlock it by merely pressing a part of the locking and unlocking device inwardly; furthermore, the top lid and the bottom of the main body are shaped such that they fit and engage with each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.