Robot with dust-free and maintenance-free actuators
US5397212A · kind A · utility
70Cited by
5References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 19, 1993 |
| Grant date | Mar 14, 1995 |
| Priority date | — |
| Expiry date | Feb 19, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67742
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A robot with no mechanically contacting components are suitable for use in special environments such as semiconductor manufacturing processes where dust and lubrication are matters of important concern. The robot has a linear actuator composed of magnetic bearings and a linear motor for moving a robot arm linearly without mechanical contact, and a rotary actuator composed of magnetic bearings and a rotary motor for rotating a body which supports the linear actuator, around the rotary actuator without mechanical contact.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.