Particle monitor for loadlock soft pump lines
US5406830A · kind A · utility
2Cited by
4References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 14, 1993 |
| Grant date | Apr 18, 1995 |
| Priority date | — |
| Expiry date | May 14, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N33/0011
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and a method provide a particle monitor mounted in an exhaust line of a loadlock chamber. The apparatus of the present invention comprises a particle monitor and a particle filter mounted down stream from the particle monitor away from the loadlock chamber. In one embodiment, the particle filter can be implemented by a wire-mesh screen, or a perforated stainless steel screen. The particle filter can be mounted in a centering ring of a standard vacuum connection which comprises two flanges, a centering ring, and an O-ring held together by a clamp.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.