Multiple angle spectroscopic analyzer utilizing interferometric and ellipsometric devices
US5412473A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 16, 1993 |
| Grant date | May 2, 1995 |
| Priority date | — |
| Expiry date | Jul 16, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/211
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical measurement device is disclosed for evaluating the parameters of a sample. The device includes a polychromatic source for generating a probe beam. The probe beam is focused on the sample surface. Individual rays within the reflected probe beam are simultaneously analyzed as a function of the position within the beam to provide information at multiple wavelengths. A filter, dispersion element and a two-dimensional photodetector array may be used so that the beam may be simultaneously analyzed at multiple angles of incidence and at multiple wavelengths. A variable image filter is also disclosed which allows a selection to be made as to the size of the area of the sample to be evaluated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.