Vacuum treatment apparatus
US5415729A · kind A · utility
13Cited by
2References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 9, 1993 |
| Grant date | May 16, 1995 |
| Priority date | — |
| Expiry date | Feb 9, 2013 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/568
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A vacuum treatment apparatus which is used for the surface treatment of substrates or workpieces in a chamber, includes at least one pneumatically or hydraulically operated seal. The seal can be activated to close against a member for sealing off the chamber, particularly, after a substrate or workpiece has been transported into or removed from the chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.