Method for the manufacture of silicon injection plates and silicon plates produced thereby

US5421952A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Juergen Buchholz · Kaufbeuren, DE
• Udo Jauernig · Lichtenstein, DE
• Alexandra Boehringer · Leonberg, DE
• Guenther Findler · Stuttgart, DE
• Horst Muenzel · Reutlingen, DE

Key dates

• Filing date: Oct 4, 1993
• Grant date: Jun 6, 1995
• Expiry date: Oct 4, 2013

Classification

• Technology area (CPC F): Mechanical Engineering; Lighting; Heating
• CPC primary: F02M61/1853
• WIPO field: Engines, pumps, turbines
• WIPO sector: Mechanical engineering

Abstract

A method for fabricating silicon injection plates is both highly precise and particularly simple. The silicon injection plate is formed by an upper silicon plate having injection holes and a lower silicon plate having a through opening and channels. The lower silicon plate is fabricated by simultaneous, double-sided etching of silicon.