Horst Muenzel
26Patents
16h-index
41Co-inventors
81Inventor score
Filing activity: Sep 24, 1990 → Nov 3, 2009
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5071510A | Process for anisotropic etching of silicon plates | Emerging Cross-Sectional Technologies | 89 | Expired |
| US5723353A | Process for manufacturing a sensor | Emerging Cross-Sectional Technologies | 71 | Expired |
| US6106735A | Wafer stack and method of producing sensors | Electricity | 65 | Expired |
| US5616514A | Method of fabricating a micromechanical sensor | Physics | 64 | Expired |
| US6318175A | Micromechanical sensor and method for the manufacture thereof | Physics | 50 | Expired |
| US6214243A | Process for producing a speed of rotation coriolis sensor | Performing Operations; Transporting | 44 | Expired |
| US5616523A | Method of manufacturing sensor | Physics | 41 | Expired |
| US5959208A | Acceleration sensor | Emerging Cross-Sectional Technologies | 41 | Expired |
| US6117701A | Method for manufacturing a rate-of-rotation sensor | Physics | 39 | Expired |
| US5721377A | Angular velocity sensor with built-in limit stops | Physics | 37 | Expired |
| US5569852A | Capacitive accelerometer sensor and method for its manufacture | Physics | 36 | Expired |
| US6055858A | Acceleration sensor | Emerging Cross-Sectional Technologies | 34 | Expired |
| US5629538A | Semiconductor sensor having a protective layer | Physics | 32 | Expired |
| US5705745A | Mass flow sensor | Physics | 26 | Expired |
| US6140709A | Bonding pad structure and method for manufacturing the bonding pad structure | Electricity | 23 | Expired |
| US5542558A | Method for manufacturing micro-mechanical components using selective anodization of silicon | Emerging Cross-Sectional Technologies | 21 | Expired |
| US6465854B1 | Micromechanical component | Performing Operations; Transporting | 15 | Expired |
| US7394349B2 | Device and method to detect presence in a motor vehicle | Performing Operations; Transporting | 15 | Expired |
| US5461917A | Acceleration sensor | Physics | 14 | Expired |
| US5703287A | Measuring element for a flow sensor | Physics | 13 | Expired |
| US5421952A | Method for the manufacture of silicon injection plates and silicon plates produced thereby | Mechanical Engineering; Lighting; Heating | 9 | Expired |
| US6076404A | Micromechanical sensor including a single-crystal silicon support | Physics | 7 | Expired |
| US6268232A | Method for fabricating a micromechanical component | Performing Operations; Transporting | 5 | Expired |
| US6656368B2 | Nonstick layer for a micromechanical component | Performing Operations; Transporting | 2 | Expired |
| US5507186A | Pressure sensor | Physics | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.