Inventor · Reutlingen, DE

Horst Muenzel

26Patents
16h-index
41Co-inventors
81Inventor score

Filing activity: Sep 24, 1990 → Nov 3, 2009

Most-cited inventions

PatentTitleAreaCited byStatus
US5071510A Process for anisotropic etching of silicon plates Emerging Cross-Sectional Technologies 89 Expired
US5723353A Process for manufacturing a sensor Emerging Cross-Sectional Technologies 71 Expired
US6106735A Wafer stack and method of producing sensors Electricity 65 Expired
US5616514A Method of fabricating a micromechanical sensor Physics 64 Expired
US6318175A Micromechanical sensor and method for the manufacture thereof Physics 50 Expired
US6214243A Process for producing a speed of rotation coriolis sensor Performing Operations; Transporting 44 Expired
US5616523A Method of manufacturing sensor Physics 41 Expired
US5959208A Acceleration sensor Emerging Cross-Sectional Technologies 41 Expired
US6117701A Method for manufacturing a rate-of-rotation sensor Physics 39 Expired
US5721377A Angular velocity sensor with built-in limit stops Physics 37 Expired
US5569852A Capacitive accelerometer sensor and method for its manufacture Physics 36 Expired
US6055858A Acceleration sensor Emerging Cross-Sectional Technologies 34 Expired
US5629538A Semiconductor sensor having a protective layer Physics 32 Expired
US5705745A Mass flow sensor Physics 26 Expired
US6140709A Bonding pad structure and method for manufacturing the bonding pad structure Electricity 23 Expired
US5542558A Method for manufacturing micro-mechanical components using selective anodization of silicon Emerging Cross-Sectional Technologies 21 Expired
US6465854B1 Micromechanical component Performing Operations; Transporting 15 Expired
US7394349B2 Device and method to detect presence in a motor vehicle Performing Operations; Transporting 15 Expired
US5461917A Acceleration sensor Physics 14 Expired
US5703287A Measuring element for a flow sensor Physics 13 Expired
US5421952A Method for the manufacture of silicon injection plates and silicon plates produced thereby Mechanical Engineering; Lighting; Heating 9 Expired
US6076404A Micromechanical sensor including a single-crystal silicon support Physics 7 Expired
US6268232A Method for fabricating a micromechanical component Performing Operations; Transporting 5 Expired
US6656368B2 Nonstick layer for a micromechanical component Performing Operations; Transporting 2 Expired
US5507186A Pressure sensor Physics 2 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.