Method for a reactive surface treatment of a workpiece and a treatment chamber for practicing such method
US5422139A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | May 25, 1993 |
| Grant date | Jun 6, 1995 |
| Priority date | — |
| Expiry date | May 25, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3244
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for a reactive surface treatment of a workpiece, according to which a treatment gas is let out of at least one infeed opening into a treatment chamber and is drawn off said treatment chamber through at least one draw off opening, which openings are arranged adjacent of each other over and across the area to the surface to be treated and feature axes of the openings which extend at least approximately perpendicularly to the surface to be treated. The treatment chamber further includes a support for positioning of the workpiece in such a manner that at least one infeed opening which is connected to a gas delivery device for a treatment gas and at least one draw off opening which is connected to a gas draw off device are located opposite the surface of the positioned workpiece.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.