Charged particle beam exposure apparatus
US5424550A · kind A · utility
13Cited by
3References
60Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Jan 21, 1994 |
| Grant date | Jun 13, 1995 |
| Priority date | — |
| Expiry date | Jan 21, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/302
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A charged particle beam exposure apparatus includes an irradiator for irradiating a sample with a charged particle beam, an analog controller for analog controlling the charged particle beam, a digital controller for digital controlling the analog controller, and a digital transmission path connecting the analog controller to the digital controller. The analog controller is disposed inside a room, and the digital controller is disposed outside the room.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.