Patent · US Expired

Interferential linear and angular displacement apparatus having scanning and scale grating respectively greater than and less than the source wavelength

US5424833A · kind A · utility

19Cited by

6References

36Claims

0Family size

Assignee

DR. JOHANNES HEIDENHAIN GMBH · DE

Inventors

Walter Huber · Traunstein, DE
Michael Allgauer · Traunreut, DE

Key dates

Filing date	Sep 21, 1993
Grant date	Jun 13, 1995
Priority date	—
Expiry date	Sep 21, 2013

Classification

Technology area (CPC G)Physics
CPC primaryG01D5/38
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An interferential apparatus and method for measuring displacement in which phase displaced signals may be generated by the proper selection of a light source and the division periods of a plurality of gratings.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.