Hinge assembly for integrated accelerometer
US5428996A · kind A · utility
10Cited by
3References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 24, 1994 |
| Grant date | Jul 4, 1995 |
| Priority date | — |
| Expiry date | Jan 24, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/093
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An integrated accelerometer includes hinges of silicon composition for securing the strut legs of a pendulous mass to the accelerometer body. Both the body of the accelerometer and the pendulous mass are of metal-coated compositions. Metallized pads are provided on selected surfaces of the hinges for forming eutectic bonds with the body and struts of the pendulous mass of the accelerometer. A heavily-doped continuous region adjacent the surface of the hinge connects the eutectic bonds through a flexure region of reduced thickness to complete necessary device circuitry.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.