Patent · US Expired

Method and apparatus for pattern detection

US5430548A · kind A · utility

40Cited by
12References
7Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 2, 1993
Grant dateJul 4, 1995
Priority date
Expiry dateFeb 2, 2013

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N21/95607
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

The inventive pattern detection method and apparatus produce, from an optical image of a pattern in attention and an optical image of a pattern which should be identical to the pattern in attention, an optical image by merging the images, with a relative phase shift being imposed, and pattern information is detected or observed in the merged optical image or a signal produced from the optical image through the conversion with an opto-electric transducer means.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.