Pumping system for evacuating reactor chambers
US5433238A · kind A · utility
19Cited by
5References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 6, 1994 |
| Grant date | Jul 18, 1995 |
| Priority date | — |
| Expiry date | Sep 6, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/877
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A system for evacuating a reactor chamber includes a main evacuation line connected at one end thereof to the reactor chamber and at another end thereof to a means for creating a partial vacuum. A valve in the main evacuation line divides the line into a chamber side and a vacuum side. A second line is connected at one end to the vacuum side of the main evacuation line and at another end to a fluid supply source. As the valve in the main evacuation line is opened, fluid is supplied through the second line to the main evacuation line to prevent rapid, turbulence-inducing pressure drops in the reactor chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.