Low cost, high average power, high brightness solid state laser
US5434875A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 24, 1994 |
| Grant date | Jul 18, 1995 |
| Priority date | — |
| Expiry date | Aug 24, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S2301/08
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A high average power, high brightness solid state laser system. A laser produces a first pulse laser beam with a high pulse frequency. A pulse spacing selector removes from the first pulse laser beam more than 80 percent of the pulses to produce a second pulse laser beam having a series of periodically spaced short pulses in excess of 1,000 pulses per second. A laser amplifier amplifies the second pulse train to produce an amplified pulse laser beam which is focused to produce pulses with brightness levels in excess of 10.sup.11 Watts/cm.sup.2. A preferred embodiment produces an amplified pulse laser beam having an average power in the range of 1 KW, an average pulse frequency of 12,000 pulses per second with pulses having brightness levels in excess of 10.sup.14 Watts/cm.sup.2 at a 20 .mu.m diameter spot which is steered rapidly to simulate a larger spot size. These beams are useful in producing X-ray sources for lithography. As compared with prior art high brightness lasers, we have reduced the pulse duration by about 2 or 3 orders of magnitude, from a few ns to 100 ps or less. We achieve our very high brightness by focusing on a very small spot, but we are able to simulate a muc…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.