Henry Shields
15Patents
11h-index
17Co-inventors
69Inventor score
Filing activity: Jan 19, 1990 → Mar 12, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6016324A | Short pulse laser system | Electricity | 78 | Expired |
| US5434875A | Low cost, high average power, high brightness solid state laser | Electricity | 73 | Expired |
| US5790574A | Low cost, high average power, high brightness solid state laser | Electricity | 70 | Expired |
| US5742634A | Picosecond laser | Electricity | 63 | Expired |
| US5940418A | Solid-state laser system for ultra-violet micro-lithography | Electricity | 50 | Expired |
| US5539764A | Laser generated X-ray source | Electricity | 38 | Expired |
| US6973164B2 | Laser-produced plasma EUV light source with pre-pulse enhancement | Electricity | 36 | Expired |
| US6855943B2 | Droplet target delivery method for high pulse-rate laser-plasma extreme ultraviolet light source | Electricity | 24 | Expired |
| US5089711A | Laser plasma X-ray source | Electricity | 17 | Expired |
| US5003543A | Laser plasma X-ray source | Electricity | 17 | Expired |
| US5491707A | Low cost, high average power, high brightness solid state laser | Electricity | 15 | Expired |
| US6835944B2 | Low vapor pressure, low debris solid target for EUV production | Electricity | 9 | Expired |
| US6933515B2 | Laser-produced plasma EUV light source with isolated plasma | Electricity | 8 | Expired |
| US6912267B2 | Erosion reduction for EUV laser produced plasma target sources | Electricity | 4 | Expired |
| US9362714B1 | Architecture for all-fiber delivery of coherently combined laser power | Electricity | 2 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.