Spindrier
US5435075A · kind A · utility
29Cited by
3References
14Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Apr 7, 1993 |
| Grant date | Jul 25, 1995 |
| Priority date | — |
| Expiry date | Apr 7, 2013 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF26B5/08
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A spindrier comprises a box enclosing a plurality of wafers, a motor for rotating the wafers in the box, upper and lower clamp bars for holding the wafers face to face and substantially perpendicular to a rotating shaft of rotating means, and gas introducing and discharging mechanisms for generating a flow of clean gas in the box. A sectional area of an open bottom of the box is smaller than a sectional area of an open top of the box, and the gas flows from the open top to the open bottom.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.