Gas injection system
US5435850A · kind A · utility
95Cited by
8References
28Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 17, 1993 |
| Grant date | Jul 25, 1995 |
| Priority date | — |
| Expiry date | Sep 17, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31742
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A gas injection system employs a crucible having a plurality of cylindrical bores within which gas is generated and a central passage leading to a dispensing nozzle. A chamber between the crucible bores and the central passage is sealed by a flexible membrane which is centrally clamped to a valve actuating rod that can be moved longitudinally via flexure of the membrane. A region behind the flexible membrane is sealed and vented to the system vacuum chamber whereby the enclosure within which the gas is generated is isolated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.