Dual absolute pressure sensor and method thereof
US5437189A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 3, 1994 |
| Grant date | Aug 1, 1995 |
| Priority date | — |
| Expiry date | May 3, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/48247
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A dual absolute pressure sensor independently converts first and second external pressures to first and second electrical signals respectively. A package body has first and second openings for receiving the first and second external pressures to outside surfaces of first and second sensor die attached to opposite surfaces of an internal glass substrate that separates the first and second openings. The first sensor die includes a first cavity having a reference pressure to measure against the first external pressure and develop a first differential pressure. A first piezoelectric network converts the first differential pressure to the first electrical signal representative of that pressure. The second sensor die includes a second cavity having a reference pressure to independently measure against the second external pressure and develop a second differential pressure. A second piezoelectric network converts the second differential pressure to the second electrical signal representative of that pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.