Energy sensitive materials and methods for their use
US5439780A · kind A · utility
32Cited by
16References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 29, 1992 |
| Grant date | Aug 8, 1995 |
| Priority date | — |
| Expiry date | Apr 29, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/167
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A class of silicon-containing materials display excellent sensitivity in the ultraviolet and deep ultraviolet for the formation of patterns by radiation induced conversion into glassy compounds. Materials are depositable from the vapor phase and show excellent promise for use such as resists in the fabrication of electronic and optical devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.