Double-sided wafer scrubber with a wet submersing silicon wafer indexer
US5442828A · kind A · utility
40Cited by
6References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 30, 1992 |
| Grant date | Aug 22, 1995 |
| Priority date | — |
| Expiry date | Nov 30, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67046
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An embodiment of the present invention is a wet indexer for receiving a cassette of wafers from a previous processing station that have not been allowed to dry. The wet indexer then keeps the wafers submersed in processing solution before and during indexed transmission to later cleaning stations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.