Patent · US Expired

Temperature sensor

US5446437A · kind A · utility

30Cited by

7References

21Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Frank Bantien · Ditzingen, DE
Eckart Reihlen · Reutlingen, DE

Key dates

Filing date	Dec 30, 1992
Grant date	Aug 29, 1995
Priority date	—
Expiry date	Dec 30, 2012

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S438/977
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An improved temperature sensor is designed for the sensitive detection of temperature changes. The temperature sensor includes a frame 9 of monocrystalline silicon and a dielectric diaphragm 13 stretched on it. A monocrystalline silicon structure 35 is disposed on or under the dielectric diaphragm which is used for measuring the temperature. In the course of this, the Seebeck effect, as well as the temperature dependence of the electrical resistance, can be used for detection of any temperature changes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.