Inventor · Ditzingen, DE

Frank Bantien

12Patents
10h-index
23Co-inventors
64Inventor score

Filing activity: Dec 21, 1990 → Apr 2, 1996

Most-cited inventions

PatentTitleAreaCited byStatus
US5151763A Acceleration and vibration sensor and method of making the same Electricity 149 Expired
US5259247A Sensor Physics 89 Expired
US5273939A Method of assembling micromechanical sensors Electricity 46 Expired
US5600074A Silicon chip for use in a force-detection sensor Emerging Cross-Sectional Technologies 45 Expired
US5616523A Method of manufacturing sensor Physics 41 Expired
US5148604A Micromechanical tilt sensor Physics 40 Expired
US5569852A Capacitive accelerometer sensor and method for its manufacture Physics 36 Expired
US5446437A Temperature sensor Emerging Cross-Sectional Technologies 30 Expired
US5452610A Mass-flow sensor Physics 24 Expired
US5542558A Method for manufacturing micro-mechanical components using selective anodization of silicon Emerging Cross-Sectional Technologies 21 Expired
US5467649A Mass flow sensor having a measuring element arranged on a membrane retained on a monocrystalline silicon wafer Physics 4 Expired
US5261639A Valve Mechanical Engineering; Lighting; Heating 2 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.