Selectable feedback control system
US5448147A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | May 7, 1993 |
| Grant date | Sep 5, 1995 |
| Priority date | — |
| Expiry date | May 7, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B13/041
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A control system includes a first estimation section for estimating a first state variable of a plant object such as a semiconductor wafer temperature control arrangement on the basis of a control input supplied to the plant object and an output from the plant object, a second estimation section for estimating a second state variable of the plant object on the basis of the control input alone, a switching section for selecting one of the first and second estimation sections, and a servo section for adjusting the control input by feeding back the state variable from the first or second estimation section to an input section of the plant object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.