Tel Varian Limited
6Patents
0Active
6Granted
28Portfolio score
Filing activity: May 7, 1993 → Aug 21, 1995
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5474410A | Multi-chamber system provided with carrier units | Emerging Cross-Sectional Technologies | 417 | Expired |
| US5728276A | Treatment apparatus | Electricity | 38 | Expired |
| US5624536A | Processing apparatus with collimator exchange device | Electricity | 32 | Expired |
| US5445675A | Semiconductor processing apparatus | Chemistry; Metallurgy | 31 | Expired |
| US5584973A | Processing apparatus with an invertible collimator and a processing method therefor | Electricity | 17 | Expired |
| US5448147A | Selectable feedback control system | Physics | 7 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.