Infrared radiation imaging array with compound sensors forming each pixel
US5449910A · kind A · utility
37Cited by
10References
5Claims
0Family size
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Key dates
| Filing date | Nov 17, 1993 |
| Grant date | Sep 12, 1995 |
| Priority date | — |
| Expiry date | Nov 17, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N19/00
Abstract
An infrared imaging array of thermoelectric sensors has a plurality of electrically connected microbridge subsensors comprising each sensor of the array. Each subsensor consists of a short span microbridge lying across a relatively small pit. The use of many of such subsensors for each sensor rather than a single large area microbridge sensor for a single pixel allows each pixel to be made large enough to give good sensitivity in either vacuum or gas-filled designs, and at the same time avoid the reduced fabrication yield which results when sensors span large pits.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.