Method and apparatus for determining an objects position, topography and for imaging
US5450203A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Dec 22, 1993 |
| Grant date | Sep 12, 1995 |
| Priority date | — |
| Expiry date | Dec 22, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Light is supplied via a optical fiber to a probe head. The light exiting the optical fiber is focused to a point by a lens. Reflected light from an object at or near the focal point is reflected back through the lens and then focused to the source optical fiber or a second optical fiber located next the source optical fiber. The return signal is then detected in a detector module. By noting the characteristics of the response curve as the object is moved back and forth relative to the probe head, the position of the object can be determined. By performing this procedure over several points, a detailed topography map can be created. Additionally, the probe head can be scanned at a constant distance from the surface to produce an image of the surface as the response signal varies according to the surface's reflectivity. The microprobe can be used, for example, to find the position of probe tips on a wafer prober, to determine the topography of the surface of the wafer, and to find the position of the wafer edge.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.