Optical probe
US5455677A · kind A · utility
10Cited by
6References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 14, 1994 |
| Grant date | Oct 3, 1995 |
| Priority date | — |
| Expiry date | Mar 14, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/007
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical probe for measurement includes a first movable part having a stylus arranged at one end of the first movable part in a Z-direction and a sliding part movable in the Z-direction in an air bearing mechanism. A measuring device measures the Z coordinate of the first movable part.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.