Differential phase contrast inspection system
US5459576A · kind A · utility
12Cited by
3References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 24, 1994 |
| Grant date | Oct 17, 1995 |
| Priority date | — |
| Expiry date | Jan 24, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/88
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A high speed, high sensitivity inspection system (10) is provided, which is substantially impervious to external factors such as vibration. The inspection system is an optical system which employs phase contrast interferometry to achieve the desired results.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.