Scanning stylus atomic force microscope with cantilever tracking and optical access

US5463897A · kind A · utility

Assignees

• Digital Instruments, Inc. · US
• The Regents of the University of California · US

Inventors

• Craig Prater · Lompoc, US
• James Massie · Lompoc, US
• David Grigg · Midland School, US
• Virgil B. Elings · Lompoc, US
• Paul K. Hansma · Isla Vista, US
• Barney Drake · Truckee, US

Key dates

• Filing date: Aug 17, 1993
• Grant date: Nov 7, 1995
• Expiry date: Aug 17, 2013

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S977/87
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A scanned-stylus atomic force microscope (AFM) employing the optical lever technique, and method of operating the same. The AFM of the invention includes a light source and a scanned optical assembly which guides a light beam emitted from the laser source onto a point on said cantilever during scanning thereof. A moving laser beam is thus created which will automatically track the movement of the cantilever during scanning. The invention also allows the laser beam to be used to measure, calibrate or correct the motion of the scanning mechanism, and further allows viewing of the sample and cantilever using an optical microscope.